Semiconductor

We offer optimal solutions for process miniaturization

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“Soulbrain provides highly optimized micro fabrication solution for the semiconductor industry, where process miniaturization has been a key emerging issue.”

CVD/ALD materials

ALD/CVD precursors, thin film deposition compounds used in the manufacture of semiconductors, were localized in Korea for the first time and produced by Soulbrain in 1992. Soulbrain has continuously researched, developed, and achieved high performance in the areas of next-generation electrode materials (High-k materials), wiring materials (Al, Cu), diffusion barrier materials (TiN, TaN), and Low-k materials (SOD) that are becoming necessary due to the increased miniaturization, high functionality, and high reliability demands of semiconductor devices.

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  • Product Examples
    • LCD/OLED TV
    • Notebook Monitor
    • Smart Pad
    • Mobile Phone
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Staff in charge of products in this area: Jaesung Ko (Manager, jsko@soulbrain.co.kr)
Kookje Lee (Manager, kjlee2@soulbrain.co.kr)

Etch & Cleaning

In response to the market demand for multi-functional cleaning solutions based on process density, Soulbrain is developing multi-functional etchants and cleaning solutions.

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  • Product examples
    • LCD/OLED TV
    • Notebook Monitor
    • Smart Pad
    • Mobile Phone
    • Navigation

Staff in charge of products in this area: Changsin Lee (Manager, cslee@soulbrain.co.kr)
Hyunsik Kim (Manager, hskim09@soulbrain.co.kr)
Jongsoo Park (Manager, jspark10@soulbrain.co.kr)

HF / BOE

HF/BOE (Hydrofluoric Acid/Buffered Oxide Etchant) used in the etching and cleaning of thermally oxidized films are super pure products for use in the semiconductor industry. Soulbrain is a leader in the areas of low-and-high E/R chemicals and high selectivity chemicals, and we ceaselessly works to satisfy the needs of the semiconductor market in which there is increasing demand for super thin films and high integration.

  • Major products
    • Major products
  • Product examples
    • LCD/OLED TV
    • Notebook Monitor
    • Smart Pad
    • Mobile Phone
    • Navigation

Staff in charge of products in this area: Changsin Lee (Manager, cslee@soulbrain.co.kr)
Hyunsik Kim (Manager, hskim09@soulbrain.co.kr)
Jongsoo Park (Manager, jspark10@soulbrain.co.kr)

CMP Slurry

CMP (Chemical Mechanical Polishing) materials have been introduced to production lines for the global planarization of high-density semiconductor products. They can be categorized into ILD/IMD, STI/SOD, W, Cu and Slurry, depending on the film properties of the target material.
Since Soulbrain began the mass production of ILD/IMD Slurry in 2001, we have use our superior R&D capabilities and cutting edge production processes to develop and provide a stable supply of a variety of products.

  • Major products
    • Major products
  • Product examples
    • LCD/OLED TV
    • Notebook Monitor
    • Smart Pad
    • Mobile Phone
    • Navigation

Staff in charge of products in this area: Shinmyeong Kang (Manager, smkang01@soulbrain.co.kr)
Seonggu Yeo (Manager, sgyeo@soulbrain.co.kr)
Joonsu Son (Manager, jsson@soulbrain.co.kr)

Cu metalizing

Cu has lower specific resistance and higher electromigration than Al, and can move electrons more rapidly. However, dry etching is difficult, which necessitates the Damascene Process. In this process, patterns are formed on silicon wafers and copper coating takes place through a method such as electrolytic plating, and unnecessary parts are removed through the CMP process.

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    • LCD/OLED TV
    • Notebook
    • Semiconductor

Staff in charge of products in this area: Jaesung Ko (Manager, jsko@soulbrain.co.kr)

Electrolyzed Water Business

With the continued narrowing of design rules, there have been an increasing number of issues, such as the increasingly problematic micro particles, and inability to use chemical cleaning liquids in the film thinning process. 
Soulbrain’s electrolyzed water is the perfect new solution for issues such as these, related to device miniaturization. In particular, our customers will experience unrivaled performance in ORP, life time, and contact angle, and achieve surprising results with the removal of particles under 30nm through our innovative micro process, improvement of dry flaws, and increased efficiency and yield.

  • Major products
    • Electrolyzed Water System
  • Effect on each parameter of electrolyzed water

Staff in charge of products in this area: Kookje Lee (Manager, kjlee2@soulbrain.co.kr)