Semiconductor

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soulbrain provides highly optimized micro fabrication solution for the semiconductor industry

CVD/ALD materials

ALD/CVD Precursors, film-deposited compounds to manufacture semiconductors were localized for the first time by soulbrain in 1992. soulbrain has consistently researched, developed, and produced high performance in the areas of the next-generation electrode materials (High-k materials), wiring materials (Al, Cu), diffusion barrier materials (TiN, TaN), and Low-k materials (SOD) that become necessary due to miniaturization, high functionality, and high reliability of semiconductors.

  • Major products
    • TEOS(Tetraethoxysilane)
    • TEB (Triethyl Borate)
    • TMB (Trimethyl Borate)
    • BBr3(Boron Tribromide)
    • TEPO (Triethyl Phosphate)
    • TMOP (Trimethyl Phosphate)
    • TMPI (Trimethyl Phosphite)
    • POCl3(Phosphorus Oxychloride)
    • TiCl4(Titanium Tetrachride)
    • Ti/TiN Precursors
    • Ta/TaN/Ta2O5 Precursors
    • Al/Al2O3 Precursors
    • HfO2/ZrO2 Precursors
    • GST/BST Precursors
    • Ru/RuO Precursors
  • Product examples
    • LCD/O.L.E.D TV
    • Notebook Monitor
    • Smart pad
    • Mobile Phone
    • Navigation

Responsible staff for product and area : Jaesung Ko Manager jsko@soulbrain.co.kr
kookje Lee Manager kjlee2@soulbrain.co.kr

Etch & Cleaning

To catch up with the market demanding multi functional cleaning solutions based on process density, Soulbrain is developing multi-functional etchants and cleaningsolutions.

  • Major products
    • Etchant : HSN/H3PO4, Poly/PAN/SPIN etchant, S-2, HNPA-1317, FMA-2P
    • Cleaning : HCl, HNO3
    • Stripper : HQS-8920, TSO-500H, TSO-800H
  • Product examples
    • LCD/O.L.E.D TV
    • Notebook Monitor
    • Smart pad
    • Mobile Phone
    • Navigation

Responsible staff for product and area : Changsin Lee Manager cslee@soulbrain.co.kr
Hyunsik Kim Manager hskim09@soulbrain.co.kr
Jongsoo Park Manager jspark10@soulbrain.co.kr

HF / BOE

HF (Hydrofluoric Acid)/BOE (Buffered Oxide Etchant) used for thermal oxidization ething and cleaning of semiconductors are super pure products for semiconductors. soulbrain is a leader in the areas of low-and-high E/R chemical and high selectivity chemicals and ceaselessly works to satisfy the needs of semiconductor markets subject to super thin filming and highly integrated.

  • Major products
    • HF(Hydrofluoric Acid)
    • BOE (LAL series)
  • Product examples
    • LCD/O.L.E.D TV
    • Notebook Monitor
    • Smart pad
    • Mobile Phone
    • Navigation

Responsible staff for product and area : Changsin Lee Manager cslee@soulbrain.co.kr
Hyunsik Kim Manager hskim09@soulbrain.co.kr
Jongsoo Park Manager jspark10@soulbrain.co.kr

CMP Slurry

CMP( Chemical Mechanical Polishing) materials have been introduced to production lines for the global planarization of high- density semiconductor products. They can be classified ILD/IMD,STI/SOD, W, Cu and Slurry, depending on a film property of a target material.Since Soulbrain has started mass production of ILD/IMD Slurry in 2001, it has been continuously developing and stably supplying a variety of products, through its excellent R&D capabilities and state of the art manufacturing processes.

  • Major products
    • ILD/IMD CMP Slurry
    • STI/SOD CMP Slurry
    • W CMP Slurry
    • Cu CMP Slurry
    • New Functional CMP Slurry
  • Product examples
    • LCD/O.L.E.D TV
    • Notebook Monitor
    • Smart pad
    • Mobile Phone
    • Navigation

Responsible staff for product and area : Shinmyeong Kang Manager smkang01@soulbrain.co.kr
Hwanchul Kim Manager hckim2@soulbrain.co.kr
Joonsu Son Manager jsson@soulbrain.co.kr

Cu metalizing

Cu는 Al보다 낮은 비저항 값과, 높은 electro migration 저항을 가지고 있어 전자의 이동을 보다 빠르게 할 수 있는 특성이 있습니다. 하지만 건식식각올 통한 etching이 어렵기 때문에  Damascene 공정을 사용하게 됩니다. 이 공정은 실리콘 웨이퍼에 패턴을 형성해 놓고 전해도금법 등을 이용하여 구리Coating 하고, 필요 없는 부분은 CMP 공정으로 제거하는 공정입니다.

  • Major products
    • TCE-C (도금액)
    • Organic Additives(Accelerator, Suppressor, Leveler)
  • Product examples
    • LCD/O.L.E.D TV
    • Notebook
    • Semiconductor

Responsible staff for product and area : Jaesung Ko Manager jsko@soulbrain.co.kr

Cu metalizing

Existing processes have issues with particles, that are now unacceptable with due to reduction in design rules and are difficult to solve with existing chemical cleaning liquids. Soulbrain’s Electrolyzed water is the perfect solution for these fine particle related issues. Our customers will find better ORP, lifetime, contact angle with innovative particle removal of less than 30nm micron process, improvement on dry flaws, and higher efficiency and yields.

  • Major products
    • Electrolyzed Water System
  • Effect on each parameter of electrolyzed water

Responsible staff for product and area : Kookje Lee manager   kjlee2@soulbrain.co.kr